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Electrical field radiated scanning electron microscope
Last Updated January 7, 2019
Introduction of electric field radiated scanning electron microscope (FE-SEM)
Overview
Principles
When an electron beam is irradiated by an electron gun is irradiated on the sample, secondary electrons are generated from the surface. By detecting the secondary electrons, it is possible to observe the unevenness and morphology of the sample surface.
Characteristics
Because the observation is performed in a high vacuum environment, it is possible to observe hundreds of thousands of times as small as possible depending on the condition of the sample.
Not good at
The specimen room is high vacuum and may be released (containing water) cannot be placed in the observation room. In addition, since electron beams are applied to the sample, the surface must be thinly coated with metal such as Au (low magnification) or Pt (high magnification) for samples. Since the surface of the sample generates heat due to the flow of electricity, in the case of a sample that is sensitive to heat, the surface may melt or burn.
Equipment Performance and Specifications
Instrument model number: JSM-7800F Prime Nippon Premier
Date of introduction: February, 2017
Example of measurement
Figure 1 ITO film created by the Solgel method
(magnification: 80000 times)
Charges
| Classification | Units | Amount |
|---|---|---|
| Surface observation | For each sample measurement point | 5,700 yen |
| Surface observation | 1 Add measurement points (Limited to the same sample) | 1,600 yen |
| Qualitative analysis (energy dispersed spectroscopy) | For each sample measurement point | 8,400 yen |
| Qualitative analysis (energy dispersed spectroscopy) | For each sample measurement point | 1,600 yen |
| Mapping (energy dispersed spectroscope) | For each sample measurement point (Limited to measurements within 3 elements) | 25,100 yen |
| Mapping (energy dispersed spectroscope) | 1 Addition of measured elements (Limited to the same measurement point) | 1,700 yen |
Charges
- Those that require special materials, labor, etc. for testing, analysis, or preparation, and the amount of fees for research or research shall be equivalent to actual costs.
- In particular, the amount of the fee or usage fee for use shall be double the amount specified.
- A person who has an office or office in Yokohama City.Small and medium-sized enterprises (external site) stipulated in Article 2 of the Small and Medium Enterprise Basic LawThe amount of commission or usage fee pertaining to requests from other than is 1.3 times the specified amount (if there is a fraction less than 100 yen, round the fractional amount is rounded up to 100 yen.) It's called.
- Fees or fees pertaining to requests from persons who do not have Address in Yokohama City or individuals who do not have offices or offices in the city or corporations or other organizations that do not have offices or offices in the city is 1.5 times the determined amount (100 yen) If there is a fraction less than, round the fractional amount is rounded up to 100 yen.) It's called.
For inquiries to this page
Small and Medium Enterprise Promotion Division, Small and Medium Enterprises, Economic Affairs Bureau
Phone: 045-671-4236
Phone: 045-671-4236
Fax: 045-664-4867
Email address: ke-keiei@city.yokohama.jp
Page ID: 609-362-275
