Ellipsomator

When light is applied to the specimen, it is reflected on the surface of the specimen and produces reflective light. Reflected light can be divided into two components, p-polarization and s polarization, and this polarization state generally becomes an elliptical (Eli Pty Cal), so this kind of measurement method is called ellipsometry. By changing the wavelength of the light applied to the sample and measuring the phase difference Δ (delta) and the amplitude ratio of the reflected light to the sample, the optical constant and film thickness of the sample is evaluated.

Because it is an optical measurement, it can be measured without destructive and the measurement time is short, so it is possible not only to evaluate the resulting thin film but also process evaluation (In-situ measurement) of the thin film during fabrication. By selecting the wavelength of the light to be applied, it is also possible to evaluate the reflectivity, transmittance, band structure, and carryer density, etc.

Because the reflected light is measured, the flatness of the surface is required. One-half of the wavelength of the light exposed is the limit. In addition, metal thin films that absorb light also has less reflected light, making it difficult to measure. Depending on the type of metal, the film thickness of about several hundred nm is the measurement limit. When multiple membranes are stacked, it is possible to measure the thickness of each film, but in this case, it is necessary to assume the interface layer that exists between the membrane and the membrane, so it is necessary to set up a model and perform calculation simulation. As a result, calculation may be complicated and difficult to interpret the results.

Instrument model number: SE-2000 Nippon Semil Lab Co., Ltd.
Date of introduction: February, 2016

Membrane thickness and optical constant measurement 6,400 yen per sample

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