Electron beam microanalyser

When an electron beam drawn from the W filament or CeB6 filament is applied to the sample, characteristic X-rays are released according to the elements that make up the sample. The characteristic X-rays are measured separately for each wavelength by spectroscopic crystals with four channels. Since characteristic X-rays have a specific wavelength depending on the type of element, the type and amount of element can be determined by the wavelength and the peak height obtained there.

In addition to knowing the type of element at one measurement point, it is possible to know the distribution status of elements on lines and surfaces. It is also possible to show the components of foreign substances spreading in a certain location as shown in a map for each element. A wide range of elements can detect a wide range of elements, from No. 4 Be (beryllium) to No. 90 U (Uran) in the periodic table.

Since it is a device that allows you to know the types of elements and their distribution status, the amount of information about organic compounds consisting of C and H. In addition, since electron beams are applied to the sample, the surface must be thinly coated with metal such as Au or Pt to measure the surface. Since the surface of the sample generates heat due to the flow of electricity, in the case of a sample that is sensitive to heat, the surface may melt or burn.

Instrument model number: EPMA-1720 Shimazu Manufacturing
Date of introduction: January, 2016

Figure 1 Observation Image of Corrosion Instruments by SEM

An image of the distribution of O (oxygen) by EPMA at the same location as Figure 1 (white points indicate the location where O is large).

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